Layered Composite Heaters for Semiconductor Processing

2018-02-20T12:34:14+00:00

Figure 1: Composite layered heater from patent  US 9,224,626 B2 Alexander Glew, Ph.D., P.E. recently contributed to a new patent on an advanced thin-film electric heaters, layered composite heaters, for CVD semiconductor processing and related technologies titled “Composite substrate for layered heaters”.  Watlow Electric, based in St. Louis, hired Glew Engineering and Dr. Glew to help develop this heater technology due to his experience in the Silicon Valley’s semiconductor industry.  As a semiconductor equipment expert and materials engineering consultant, Dr. Glew’s familiarity with semiconductor manufacturing meant he understood both the limitations of common semiconductor chuck heating methods and the techniques that could be used to construct a better heater.  In this post, we review how this composite heater capitalizes on semiconductor [...]

Layered Composite Heaters for Semiconductor Processing 2018-02-20T12:34:14+00:00

Thermal Expansion in a Glass and Aluminum Window: Part 2

2018-02-20T13:29:14+00:00

Figure 1: Simplified model of an aluminum-glass window   In last week’s blog, Thermal Expansion in a Glass and Aluminum Window: Part 1, we introduced the basic concept of thermal expansion in solid materials.  Since CTE mismatch can impose extremely high stress, during mechanical engineering design one must consider the temperature exposure and expansion or contraction of a material.  In order to help the read gain insight, we used a simplified aluminum-framed window to demonstrate that a hot summer day would be enough to shatter glass if the window wasn’t equipped with a flexible gasket between the frame and the glass.  For this entry, we utilize a finite element analysis (FEA) to elucidate the stress effects caused by both high and [...]

Thermal Expansion in a Glass and Aluminum Window: Part 2 2018-02-20T13:29:14+00:00