Figure 1: Composite layered heater from patent US 9,224,626 B2 Alexander Glew, Ph.D., P.E. recently contributed to a new patent on an advanced thin-film electric heaters, layered composite heaters, for CVD semiconductor processing and related technologies titled “Composite substrate for layered heaters”. Watlow Electric, based in St. Louis, hired Glew Engineering and Dr. Glew to help develop this heater technology due to his experience in the Silicon Valley’s semiconductor industry. As a semiconductor equipment expert and materials engineering consultant, Dr. Glew’s familiarity with semiconductor manufacturing meant he understood both the limitations of common semiconductor chuck heating methods and the techniques that [...]
Mechanical engineering for high-purity processes in semiconductor fabs: gas distribution lines for transporting hazardous gases and materials.
Mechanical engineering design for high-purity processes in semiconductor fabs: process pumps, abatement and exhaust lines.
Series on Semiconductor Processing and ICs, Part 14: Inventions that Lead to the Modern Integrated Circuit
A brief review of crucial semiconductor industry inventions that lead to current integrated circuits.
A brief overview of integrated circuit design and functions in the semiconductor industry.
Series on Semiconductor Processing and Integrated Circuits, Part 11: Basic Semiconductor Circuit Components
The following is a brief over view of semiconductor circuit components.
UC Riverside engineering team uses silicon dioxide found in Silly Putty to improve lithium-ion batteries.
A review of process and device evaluation in semiconductor processing.
A brief review of metallization in semiconductor processing.
Researchers at the University of Surrey have developed a light sensor that could allow for medical and security imaging via low cost cameras.
A brief review of ion implantation in the semiconductor processing industry.
Series on Semiconductor Processing and Integrated Circuits, Part 6: Multilayer Photoresist Processing
A look at multilayer photoresist processing.
A review of semiconductor processing, specifically various development processes.
A description of photoresists used in semiconductor processing.
A review of oxidation during semiconductor fabrication and semiconductor processing.
A brief review how process yields effect the semiconductor processing industry.
Semiconductor packaging, one of the final phases of semiconductor processing, is explored.
Discussing the engineering constraints, thermal management, and design ideas for chuck heaters used within the semiconductor process.
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