High-purity Gas Panels Part 11: Mass Flow Controllers

By | 2017-05-04T14:14:07+00:00 October 9th, 2015|Mechanical Engineering, Semiconductor|

Thermal Mass Flow Controllers A mass flow controller (MFC) for each gas line in a semiconductor tool’s gas panel measures and regulates the mass flow of the gas in order to set the gas entering the process chamber to the values in the process recipe.  While pressure regulation and temperature control are needed for sensitive chemical vapor deposition (CVD), plasma etching, or thin film processes, gas flow control can be just as important. Semiconductor process recipes involve precise ratios of gas phase chemical to assure the correct stoichiomtery and reaction rates.   Due to the accuracy and precision required [...]

High-Purity Gas Panels Part 10: Pressure Transducers in Semiconductor Equipment

By | 2017-05-31T11:56:37+00:00 October 1st, 2015|Electrical Engineering, Engineering Consulting, Mechanical Engineering, Safety, Semiconductor|

An article on pressure transducers used in semiconductor fabs and semiconductor equipment.

High-purity Gas Panels Part 3: To Abatement and Exhaust

By | 2017-05-05T10:55:03+00:00 July 27th, 2015|Engineering Consulting, Mechanical Engineering, Safety, Semiconductor|

Mechanical engineering design for high-purity processes in semiconductor fabs: process pumps, abatement and exhaust lines.

When to Hire an Engineering Consultant or Technical Subject Matter Expert for Litigation Support

By | 2017-05-22T11:33:08+00:00 April 6th, 2011|Mechanical Engineering|

Glew Engineering specializes in engineering consulting, with trained professionals equipped to handle your business requirements.