Semiconductor Safety: Pyrophoric Gases

By | 2017-11-08T16:11:01+00:00 February 19th, 2016|Mechanical Engineering, Safety, Semiconductor|

We have written about pyrophoric materials in a number of Glew Engineering’s previous blogs on safety in semiconductor fabrication, but have yet to cover how to define it or its danger.  At its simplest, a pyrophoric substance is any substance that spontaneously ignites in room temperature air.  As one might imagine, spontaneous combustion on contact with the regular atmosphere we live in can be quite dangerous. Last year, Glew Engineering assisted a research lab in designing a safe gas distribution system for their plasma-enhanced chemical vapor deposition chamber.  During the initial work, the building administrators and safety managers were concerned about the lab’s proposed [...]

High-purity Gas Panels Part 11: Mass Flow Controllers

By | 2017-05-04T14:14:07+00:00 October 9th, 2015|Mechanical Engineering, Semiconductor|

Thermal Mass Flow Controllers A mass flow controller (MFC) for each gas line in a semiconductor tool’s gas panel measures and regulates the mass flow of the gas in order to set the gas entering the process chamber to the values in the process recipe.  While pressure regulation and temperature control are needed for sensitive chemical vapor deposition (CVD), plasma etching, or thin film processes, gas flow control can be just as important. Semiconductor process recipes involve precise ratios of gas phase chemical to assure the correct stoichiomtery and reaction rates.   Due to the accuracy and precision required [...]

High-Purity Gas Panels Part 10: Pressure Transducers in Semiconductor Equipment

By | 2017-05-31T11:56:37+00:00 October 1st, 2015|Electrical Engineering, Engineering Consulting, Mechanical Engineering, Safety, Semiconductor|

An article on pressure transducers used in semiconductor fabs and semiconductor equipment.

High-purity Gas Panels Part 3: To Abatement and Exhaust

By | 2017-05-05T10:55:03+00:00 July 27th, 2015|Engineering Consulting, Mechanical Engineering, Safety, Semiconductor|

Mechanical engineering design for high-purity processes in semiconductor fabs: process pumps, abatement and exhaust lines.