High-purity Gas Panels Part 11: Mass Flow Controllers

2018-03-22T16:08:42+00:00

Thermal Mass Flow Controllers A mass flow controller (MFC) for each gas line in a semiconductor tool’s gas panel measures and regulates the mass flow of the gas in order to set the gas entering the process chamber to the values in the process recipe.  While pressure regulation and temperature control are needed for sensitive chemical vapor deposition (CVD), plasma etching, or thin film processes, gas flow control can be just as important. Semiconductor process recipes involve precise ratios of gas phase chemical to assure the correct stoichiomtery and reaction rates.   Due to the accuracy and precision required of the gas flow rate, mass flow controllers are often the most sensitive and expensive components installed in a gas [...]

High-purity Gas Panels Part 11: Mass Flow Controllers 2018-03-22T16:08:42+00:00

High-Purity Gas Panels Part 10: Pressure Transducers in Semiconductor Equipment

2017-05-31T11:56:37+00:00

An article on pressure transducers used in semiconductor fabs and semiconductor equipment.

High-Purity Gas Panels Part 10: Pressure Transducers in Semiconductor Equipment 2017-05-31T11:56:37+00:00

High-purity Gas Panels Part 9: Pressure Measurement in the Semiconductor Fab

2017-05-04T14:58:28+00:00

Pressure gauges and pressure transducer use in semiconductor fabs.

High-purity Gas Panels Part 9: Pressure Measurement in the Semiconductor Fab 2017-05-04T14:58:28+00:00

High-Purity Gas Panels Part 7: Gas Pressure Regulators and Pressure Control

2017-05-04T14:51:06+00:00

Devices for regulating gas pressure in semiconductor processes.

High-Purity Gas Panels Part 7: Gas Pressure Regulators and Pressure Control 2017-05-04T14:51:06+00:00

High-purity Gas Panels Part 3: To Abatement and Exhaust

2017-05-05T10:55:03+00:00

Mechanical engineering design for high-purity processes in semiconductor fabs: process pumps, abatement and exhaust lines.

High-purity Gas Panels Part 3: To Abatement and Exhaust 2017-05-05T10:55:03+00:00

High-purity Gas Panels Part 2: Gas Distribution in the Fab

2018-02-28T10:30:54+00:00

Mechanical engineering design for high-purity processes in semiconductor fabs: gas cabinets, liquid sources and valve manifold boxes.

High-purity Gas Panels Part 2: Gas Distribution in the Fab 2018-02-28T10:30:54+00:00