Thermal Mass Flow Controllers A mass flow controller (MFC) for each gas line in a semiconductor tool’s gas panel measures and regulates the mass flow of the gas in order to set the gas entering the process chamber to the values in the process recipe. While pressure regulation and temperature control are needed for sensitive chemical vapor deposition (CVD), plasma etching, or thin film processes, gas flow control can be just as important. Semiconductor process recipes involve precise ratios of gas phase chemical to assure the correct stoichiomtery and reaction rates. Due to the accuracy and precision required of the gas flow rate, mass flow controllers are often the most sensitive and expensive components installed in a gas [...]
An article on pressure transducers used in semiconductor fabs and semiconductor equipment.
Pressure gauges and pressure transducer use in semiconductor fabs.
Devices for regulating gas pressure in semiconductor processes.
Valve specification and design for high purity semiconductor equipment.
Mechanical engineering for high-purity processes in semiconductor fabs: gas distribution lines for transporting hazardous gases and materials.
Mechanical engineering design for high-purity processes in semiconductor fabs: process pumps, abatement and exhaust lines.
Mechanical engineering design for high-purity processes in semiconductor fabs: gas cabinets, liquid sources and valve manifold boxes.
Introduction to our blog series on the complexities of mechanical engineering design for high-purity gas panels in semiconductor fabrication.