Semiconductor Safety: Pyrophoric Gases

By | 2017-11-08T16:11:01+00:00 February 19th, 2016|Mechanical Engineering, Safety, Semiconductor|

We have written about pyrophoric materials in a number of Glew Engineering’s previous blogs on safety in semiconductor fabrication, but have yet to cover how to define it or its danger.  At its simplest, a pyrophoric substance is any substance that spontaneously ignites in room temperature air.  As one might imagine, spontaneous combustion on contact with the regular atmosphere we live in can be quite dangerous. Last year, Glew Engineering assisted a research lab in designing a safe gas distribution system for their plasma-enhanced chemical vapor deposition chamber.  During the initial work, the building administrators and safety managers were concerned about the lab’s proposed [...]